?url_ver=Z39.88-2004&rft_id=oai%3Aojs.pkp.sfu.ca%3Aarticle%2F5282&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=SHOXIDA&rft.aulast=PAZILOVA&rft.au=PAZILOVA%2C+SHOXIDA&rft.atitle=NANOTEXNOLOGIYA+VA+UNI+ELEKTRONIKA+FANINI+O%E2%80%98QITISHDAGI+O%E2%80%98RNI&rft.title=Journal+of+Science-Innovative+Research+in+Uzbekistan&rft.date=21+Aprel+2024&rft.genre=article