eprintid: 51471 rev_number: 1 eprint_status: archive userid: 1 dir: disk0/00/05/14/71 datestamp: 2026-05-26 15:31:46 lastmod: 2026-05-26 15:31:47 status_changed: 2026-05-26 15:31:46 type: article metadata_visibility: show sword_depositor: 1 creators_name: Maksymova, Svitlana creators_name: Chala, Olena title: DEFECT ENGINEERING: APPLICATION IN AUTOMATION SYSTEM COMPONENTS PRODUCTION TECHNOLOGICAL PROCESSES ispublished: pub subjects: Defect engineering, Automation system, MEMS, MOEMS, Silicon structures keywords: Defect engineering, Automation system, MEMS, MOEMS, Silicon structures note: Imported from MJST Journal (OAI id oai:ojs.pkp.sfu.ca:article/226) abstract: Defect engineering is a field of scientific development that finds application in various fields. At the same time, the goals of using its approaches may differ radically. This article provides an overview of common applications of this concept. The authors propose to use the capabilities of defect engineering in the production of MEMS and MOEMS to predict failures, as well as to make possible changes and adjustments to the technological process. date: 2023-10-20 date_type: published publisher: Center for Tech and Media Research official_url: https://mjstjournal.com/index.php/mjst/article/view/226 id_number: oai:ojs.pkp.sfu.ca:article/226 full_text_status: none publication: Multidisciplinary Journal of Science and Technology citation: Maksymova, Svitlana, Chala, Olena (2023) DEFECT ENGINEERING: APPLICATION IN AUTOMATION SYSTEM COMPONENTS PRODUCTION TECHNOLOGICAL PROCESSES. Multidisciplinary Journal of Science and Technology.