TY  - JOUR
A1  - Maksymova, Svitlana
A1  - Chala, Olena
AV  - none
ID  - arxiv51471
Y1  - 2023/10/20/
UR  - https://mjstjournal.com/index.php/mjst/article/view/226
KW  - Defect engineering
KW  -  Automation system
KW  -  MEMS
KW  -  MOEMS
KW  -  Silicon structures
JF  - Multidisciplinary Journal of Science and Technology
TI  - DEFECT ENGINEERING: APPLICATION IN AUTOMATION SYSTEM COMPONENTS PRODUCTION TECHNOLOGICAL PROCESSES
PB  - Center for Tech and Media Research
N2  - Defect engineering is a field of scientific development that finds application in various fields. At the same time, the goals of using its approaches may differ radically. This article provides an overview of common applications of this concept. The authors propose to use the capabilities of defect engineering in the production of MEMS and MOEMS to predict failures, as well as to make possible changes and adjustments to the technological process.
N1  - Imported from MJST Journal (OAI id oai:ojs.pkp.sfu.ca:article/226)
ER  -