%0 Journal Article
%A Maksymova, Svitlana
%A Chala, Olena
%D 2023
%F arxiv:51471
%I Center for Tech and Media Research
%J Multidisciplinary Journal of Science and Technology
%K Defect engineering, Automation system, MEMS, MOEMS, Silicon structures
%T DEFECT ENGINEERING: APPLICATION IN AUTOMATION SYSTEM COMPONENTS PRODUCTION TECHNOLOGICAL PROCESSES
%U https://arxiv.universalpublishings.com/id/eprint/51471/
%X Defect engineering is a field of scientific development that finds application in various fields. At the same time, the goals of using its approaches may differ radically. This article provides an overview of common applications of this concept. The authors propose to use the capabilities of defect engineering in the production of MEMS and MOEMS to predict failures, as well as to make possible changes and adjustments to the technological process.
%Z Imported from MJST Journal (OAI id oai:ojs.pkp.sfu.ca:article/226)